10.3.2023 Optimization of Iridium RF-Sputter Process for AlGaN/GaN-based HEMT Gate Technology

Ina Ostermay, Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik (FBH)
Sten Seifert, Ferdinand-Braun-Institut (FBH)
Olaf Krueger, Ferdinand-Braun-Institut (FBH)

10.3.2023 Ostermay final