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10.3.2023 Optimization of Iridium RF-Sputter Process for AlGaN/GaN-based HEMT Gate Technology
I. Ostermay, Ferdinand-Braun-Institut (FBH)
Sten Seifert, Ferdinand-Braun-Institut (FBH)
Olaf Krueger, Ferdinand-Braun-Institut (FBH)
10.3.2023 Ostermay final
