May 01, 2019 // 2:50pm – 3:10pm

10.4 Development of Advanced Lift Off Processes for 5G and VCSEL Applications

Jonathan Fijal, Veeco Instruments
Kenji Nulman, Veeco Instruments
Anil Vijayendran, Veeco Instruments
David Rennie, EMD Performance Materials
Alberto Dioses, EMD Performance Materials
John Zook, EMD Performance Materials
John Sagan, EMD Performance Materials
Shihu Deng, Ferrotec (USA) Corp.
Laura Mauer, Ferrotec (USA) Corp.
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