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10.4 Impact of device parameter on performance of SAW resonators on AlN/sapphire
Shuai Yang, Institute of Semiconductors, Chinese Academy of Sciences
Yun Zhang, Institute of Semiconductors, Chinese Academy of Sciences, Beijing
Zhe Cheng, Institute of Semiconductor, Chinese Academy of Sciences, Beijing
Lian Zhang, Institute of Semiconductor, Chinese Academy of Sciences, Beijing
Junxi Wang, Institute of Semiconductor, Chinese Academy of Sciences, Beijing
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