10a.1 Uniformity Improvement and Defect Reduction of NiCr Thin Film Resistor

Chang’e Weng, Qorvo
Jinhong Yang, Qorvo
Ronald Herring, Qorvo
Don Hamilton, Qorvo
Kaushik Vaidyanathan, Qorvo Inc.
Brian Zevenbergen, Qorvo, Inc.
Fred Pool, Qorvo
Jeremy Middleton*, TriQuint Semiconductor, Inc.
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