As frequencies increase, the use of smaller value metal-insulator-metal (MIM) capacitors increases. For small capacitors, errors due to the bias of the top plate can cause significant errors. This bias is not correctly monitored with resistance based dW (RLWB) monitors. We present a simple capacitive based technique that uses only two test patterns to determine the value of the capacitive linewidth bias (CLWB) that is more appropriate for use electromagnetic (EM) simulation.
