11.1.5.2024 Electron-beam Deposition with Low- Spitting Platinum Source Material Improved by New Impurity Removal Processes

Atsushi Kawashimo, Matsuda Sangyo Co., Ltd.
Takahiro Kobayashi, Matsuda Sangyo Co., Ltd.
Masatoshi Koyama, Osaka Institute of Technology
Yuichiro Shindo, Matsuda Sangyo Co., Ltd.
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