Explore
Our Mission
Board of Directors
Executive Committee
Technical Program Committee
2022 Conference Collage
Sponsors
Exhibitor
Authors
Digests
Contact
2025 Second Call for Papers
Authors link
Abstract Submission Site is LIVE!
The first 10 abstracts submitted and accepted will be eligible for a prize drawing.
Submission Link
Explore
Our Mission
Board of Directors
Executive Committee
Technical Program Committee
2022 Conference Collage
Sponsors
Exhibitor
Authors
Digests
Contact
2025 Second Call for Papers
Authors link
11.2.2023 High selectivity GaN to AlGaN etching for HEMT devices
Will Worster, Swansea University
Will Worster, KLA Corporation (SPTS Division)
Richard Barnett, KLA Corporation (SPTS Division)
Jih-Wen Chou, PSMC (8” Tech Dev Center)
Robin Chistine Hwang, PSMC (8” Tech Dev Center)
Yen-Ling Chuang, PSMC (Fab 8B)
Jia-Wei Hsu, PSMC (Fab 8B)
11.2 High selectivity GaN to AlGaN etching for HEMT devices (Matt Day – KLA-PSMC) – FINAL
