11.3 Investigation of the Interface Traps and Current Collapse in LPCVD SiNx/AlGaN/GaN MISHEMTs

Kun Yu, Xi’an Jiaotong University
Chao Liu, Hong Kong University of Science and Technology
Huaxing Jiang, Hong Kong University of Science and Technology
Xing Lu, Hong Kong University of Science and Technology
Kei May Lau, Hong Kong University of Science and Technology
Anping Zhang, Xi'an Jiaotong University
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