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11.5 Optimization of AlGaN/GaN HEMT SiN Passivation by Mixed Frequency PECVD
Marko Tadjer, U.S. Naval Research Laboratory
Andrew Koehler, Naval Research Laboratory
Charles Eddy, US Naval Research Laboratory
Jr., Naval Research Laboratory
Karl D. Hobart, U.S. Naval Research Laboratory
Fritz Kub, Naval Research Laboratory
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