Abstract
In this work, the development of solar-blind ultraviolet detectors based on the AlGaN materials system is discussed. This development includes design, growth, characterization, fabrication, and packaging of devices in a vertically integrated environment. The advantage of keeping all major steps needed to realize the devices in-house is discussed with focus on process control and holistic device manufacturing. Finally, device properties including sensitivity and efficiency are presented and an outlook on future developments is given.
