12.0.3.2024 3D Visualization and Characterization of SiC MOSFET Junctions Using EBIC and FIB-SEM Tomography

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Heiko Stegmann, Carl Zeiss Microscopy

Greg Johnson, Carl Zeiss Microscopy

David Taraci, Carl Zeiss Microscopy

Andreas Rummel, Kleindiek Nanotechnik

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