12.0.4.2024 Sonic Lift-off (SLO) to Enable Substrate Reuse of Bulk GaN and SiC Substrates

P. Guimerá Coll, Crystal Sonic Inc.
T. Black, Crystal Sonic Inc.
J. Abraham, Crystal Sonic Inc.
S. Kamishetty, Crystal Sonic Inc.
A.P. Merkle, Crystal Sonic Inc.
L. Bathurst, Crystal Sonic Inc.
M. Bertoni, Crystal Sonic Inc.
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