12.7 Improvement of Light Extraction Efficiency of AlGaN-based Deep-ultraviolet Light Emitting Diodes

Yanan Guo, Institute of Semiconductors, Chinese Academy of Sciences; University of Chinese Academy of Sciences

Yun Zhang, Institute of Semiconductors, Chinese Academy of Sciences, Beijing

Jianchang Yan, Institute of Semiconductors, Chinese Academy of Sciences; University of Chinese Academy of Sciences

Xiang Chen, Institute of Semiconductors, Chinese Academy of Sciences; University of Chinese Academy of Sciences

Tongbo Wei

Junxi Wang, Institute of Semiconductor, Chinese Academy of Sciences, Beijing

Jinmin Li, NAURA Technology Group Co., Ltd.

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