Explore
Our Mission
Board of Directors
Executive Committee
Technical Program Committee
2022 Conference Collage
Sponsors
Exhibitor
Authors
Digests
Contact
Explore
Our Mission
Board of Directors
Executive Committee
Technical Program Committee
2022 Conference Collage
Sponsors
Exhibitor
Authors
Digests
Contact
13.1 High Aspect Ratio Vias in Silicon Carbide Etched by Inductively-Coupled Plasma
Marko Tadjer, U.S. Naval Research Laboratory
Lunet Luna, U.S. Naval Research Laboratory
Eugene Imhoff, Naval Research Laboratory
Karl D. Hobart, U.S. Naval Research Laboratory
Fritz Kub, Naval Research Laboratory
Download Paper