13.3 Recessing Process for Au-free Ohmic Contacts Formation on AlGaN/GaN Heterostructures with AlN Spacer

Aurore Constant, ON Semiconductor, Corp. R&D
Joris Baele, ON Semiconductor, Corp. R&D
Peter Coppens, ON Semiconductor, Corp. R&D
Freddy De Pestel, ON Semiconductor, Corp. R&D
Peter Moens, ON Semiconductor, Corp. R&D
Marnix Tack, ON Semiconductor, Corp. R&D
Download Paper