14.10 Fabrication of Hollow Structures Using Atomic Layer Deposition

Masayuki Nakamura, SAMCO Inc.
Takayuki Kobayashi, SAMCO Inc.
Tatsurou Sagawa, SAMCO inc.
Shin-ichi Motoyama
Kouichirou Yuki, Yamaguchi University
Ryo Inomoto, Yamaguchi University
Osamu Tsuji, Yamaguchi University
Kazuyuki Tadatomo, Yamaguchi University
Peter C Wood, SAMCO Inc.
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