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Explore
Our Mission
Board of Directors
Executive Committee
Technical Program Committee
2022 Conference Collage
Sponsors
Exhibitor
Authors
Digests
Contact
14.10 Fabrication of Hollow Structures Using Atomic Layer Deposition
Masayuki Nakamura, SAMCO Inc.
Takayuki Kobayashi, SAMCO Inc.
Tatsurou Sagawa, SAMCO inc.
Shin-ichi Motoyama
Kouichirou Yuki, Yamaguchi University
Ryo Inomoto, Yamaguchi University
Osamu Tsuji, Yamaguchi University
Kazuyuki Tadatomo, Yamaguchi University
Peter C Wood, SAMCO Inc.
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