14.10 Fabrication of Hollow Structures Using Atomic Layer Deposition

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Masayuki Nakamura, SAMCO Inc.

Takayuki Kobayashi, SAMCO Inc.

Tatsurou Sagawa, SAMCO inc.

Shin-ichi Motoyama

Kouichirou Yuki, Yamaguchi University

Ryo Inomoto, Yamaguchi University

Osamu Tsuji, Yamaguchi University

Kazuyuki Tadatomo, Yamaguchi University

Peter C Wood, SAMCO Inc.

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