14.12 Enhancing the Manufacturability and Evolving the Technology of GaN on SiC Back-Side Vias

Chia-Hao Chen, WIN Semiconductors Corp
Yu-Wei Chang, WIN Semiconductors Corp
Shih-Hui Huang, WIN Semiconductors Corp
Fraser Wang, WIN Semiconductors Corp
Benny Ho, WIN Semiconductors Corp
Walter Wohlmuth, WIN Semiconductors Corp
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