14.2 TaC Coated Wafer Carrier for GaN MOCVD for Blue Light-Emitting Diodes

Hao Qu, Momentive Performance Materials
Wei Fan, Momentive Performance Materials Inc
Ashwin Rishinaramangalam, Center for High Technology Materials, Department of Electrical Engineering, University of New Mexico
Morteza Monavarian, Center for High Technology Materials, Department of Electrical Engineering, University of New Mexico
Daniel Feezell, Center for High Technology Materials, Department of Electrical Engineering, University of New Mexico
Sudarshan Natarajan, Momentive Performance Materials
Creighton Tomek, Momentive Performance Materials
Gregory Shaffer, Momentive Performance Materials
B. Kozak, Momentive Technologies
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