14.2 TaC Coated Wafer Carrier for GaN MOCVD for Blue Light-Emitting Diodes

Hao Qu, Momentive Performance Materials

Wei Fan, Momentive Performance Materials Inc

Ashwin Rishinaramangalam, Center for High Technology Materials, Department of Electrical Engineering, University of New Mexico

Morteza Monavarian, Center for High Technology Materials, Department of Electrical Engineering, University of New Mexico

Daniel Feezell, Center for High Technology Materials, Department of Electrical Engineering, University of New Mexico

Sudarshan Natarajan, Momentive Performance Materials

Creighton Tomek, Momentive Performance Materials

Gregory Shaffer, Momentive Performance Materials

B. Kozak, Momentive Technologies

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