14.4 Device Development of Gallium Oxide MOSFETs Grown by MOVPE on Native Substrates for High-Voltage Applications

Neil Moser A., Air Force Research Laboratory, Sensors Directorate, Wright-Patterson AFB, OH,
Kelson Chabak, Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USA
Andrew Green, Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USA
Dennis Walker, Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USA
Stephen Tetlak, AFRL
Eric Heller, AFRL
Antonio Crespo, AFRL
Robert Fitch, AFRL
Jonathan McCandless, AFRL
Kevin Leedy, AFRL
Michele Baldini, Leibniz-Institut für Kristallzüchtung
Guenter Wagner, Leibniz-Institut für Kristallzüchtung
Glen Via, AFRL
John Blevins, Air Force Research Laboratory (AFRL), Wright-Patterson AFB, OH
Gregg Jessen, AFRL
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