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14.6 Development of Si-doped 8-inch GaAs substrates
Masanori Morishita, Sumiden Semiconductor Materials Co., Ltd, Kobe
Hidetoshi Takayama, Sumiden Semiconductor Materials Co., Ltd, Kobe
Shuichi Kaneko, Sumiden Semiconductor Materials Co., Ltd, Kobe
Hirokazu Ota, Sumiden Semiconductor Materials Co., Ltd, Kobe
Tatsuya Moriwake, Sumiden Semiconductor Materials Co., Ltd, Kobe
Satoshi Horikawa, Sumitomo Electric Industries, Ltd, Itami
Kouji Morishige, Sumitomo Electric Industries, Ltd, Itami
Yoshiaki Hagi, Sumitomo Electric Industries, Ltd, Itami
Yoshiki Yabuhara, Sumitomo Electric Industries, Ltd, Itami
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