14.9 Fabrication of True Vertical GaN Schottky Diodes from 150 mm Engineered Substrates

Lunet E. Luna, NRC Postdoctoral Fellow Residing at NRL
Marko J. Tadjer, U.S. Naval Research Laboratory
Ozgur Aktas, QROMIS, USA
Fritz J. Kub, U.S. Naval Research Laboratory
Download Paper