14.9 Fabrication of True Vertical GaN Schottky Diodes from 150 mm Engineered Substrates

Andrew D. Koehler, U.S. Naval Research Laboratory
Lunet E. Luna, NRC Postdoctoral Fellow Residing at NRL
Marko J. Tadjer, U.S. Naval Research Laboratory
Ozgur Aktas, QROMIS, USA
Travis J. Anderson, U.S. Naval Research Laboratory
Karl D. Hobart, U.S. Naval Research Laboratory
Fritz J. Kub, U.S. Naval Research Laboratory
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