15.3.2023 Characterization of Nitridated Ga2O3 for GaN-on-Ga2O3 Power Device Applications

Matthew Landi, University of Illinois at Urbana-Champaign
Frank Kelly, University of Illinois at Urbana-Champaign
Riley Vesto, University of Illinois at Urbana-Champaign
Marko J. Tadjer, U.S. Naval Research Laboratory
Kyekyoon Kim, University of Illinois at Urbana-Champaign

15.3.2023_Landi-KK_CSMantech2023_ExtendedAbstract_CharacterizationOfNitridatedGa2O3