15.3 Growth of InGaAs-Channel Transistor Layers on Large-Scale Si Wafers for Hetero-Integration with Si CMOS

Xuan Sang Nguyen, Singapore-MIT Alliance for Research and Technology

Sachin Yadav, National University of Singapore

Kwang Hong Lee, Singapore-MIT Alliance for Research and Technology

David Kohen, ASM Belgium

Annie Kumar, National University of Singapore

R. I. Made, Singapore-MIT Alliance for Research and Technology

Xiao Gong, National University of Singapore

Kenneth Eng Kian Lee, Singapore-MIT Alliance for Research and Technology

Chuan Seng Tan, Nanyang Technological University

Soon Fatt Yoon, Nanyang Technological University

Eugene Fitzgerald, Massachusetts Institute of Technology

Soo Jin Chua, National University of Singapore

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