15.3 Growth of InGaAs-Channel Transistor Layers on Large-Scale Si Wafers for Hetero-Integration with Si CMOS

Xuan Sang Nguyen, Singapore-MIT Alliance for Research and Technology
Sachin Yadav, National University of Singapore
Kwang Hong Lee, Singapore-MIT Alliance for Research and Technology
David Kohen, ASM Belgium
Annie Kumar, National University of Singapore
R. I. Made, Singapore-MIT Alliance for Research and Technology
Xiao Gong, National University of Singapore
Kenneth Eng Kian Lee, Singapore-MIT Alliance for Research and Technology
Chuan Seng Tan, Nanyang Technological University
Soon Fatt Yoon, Nanyang Technological University
Eugene Fitzgerald, Massachusetts Institute of Technology
Soo Jin Chua, National University of Singapore
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