15.4.2023 Noncontact Measurement of Doping with Enhanced Throughput and High Precision for Wide Bandgap Wafer Manufacturing

M. Wilson, Semilab SDI

Carlos Almeida, Semilab SDI

I. Shekerov, Semilab SDI

Bret Schrayer, Semilab SDI, Tampa, FL,

Alexandre Savtchouk, Semilab SDI

B. Wilson, Semilab SDI

Jacek Lagowski, Semilab SDI, Tampa, FL,