16.5 Epitaxial Lift-Off from Native GaN Substrates Using Photoenhanced Wet Etching

Chris Youtsey, MicroLink Devices, Inc.
Robert McCarthy, MicroLink Devices
Rekha Reddy, MicroLink Devices
Andy Xie, Qorvo
Ed Beam, Qorvo
Jingshan Wang, Notre Dame
Patrick Fay, Notre Dame
Eric Carlson, Virginia Tech
Lou Guido, Virginia Tech
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