18.1 Link Between Silicon Nitride Stoichiometry, Vertical Epitaxial Conductivity and Current Collapse in AlGaN/GaN Power Devices

William Waller, University of Bristol
Mark Gajda, NXP Semiconductors
Saurabh Pandey, NXP Semiconductors
Johan Donkers, NXP Semiconductors
David Calton, NXP Semiconductors
Jeroen Croon, NXP Semiconductors
Serge karboyan, University of Bristol
Michael Uren, University of Bristol
Martin Kuball, University of Bristol
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