18.11.2023 Ionization Thresholds and Residue Removal in Inductively Coupled Etching of NiO/Ga2O3 with Ar and BCl3

Chao-Ching Chiang, University of Florida, Gainesville, FL
Xinyi Xia, University of Florida, Gainesville, FL
Jian-Sian Li, University of Florida, Gainesville, FL
Fan Ren, University of Florida
Stephen Pearton, University of Florida

18.11.2023_Chiang