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18.11.2023 Ionization Thresholds and Residue Removal in Inductively Coupled Etching of NiO/Ga2O3 with Ar and BCl3
Chao-Ching Chiang, University of Florida, Gainesville, FL
Xinyi Xia, University of Florida, Gainesville, FL
Jian-Sian Li, University of Florida, Gainesville, FL
Fan Ren, University of Florida
Stephen Pearton, University of Florida
18.11.2023_Chiang
