18.3 Threshold Voltage Control by Tuning Charge in ZrO2 Gate Dielectrics for Normally-off AlGaN/GaN MOS-HEMTs

Travis Anderson, Naval Research Laboratory

Virginia Wheeler, U.S. Naval Research Laboratory

David Shahin, University of Maryland

Marko Tadjer, Naval Research Laboratory

Lunet Luna, U.S. Naval Research Laboratory

Andrew Koehler, Naval Research Laboratory

Karl Hobart, Naval Research Laboratory

Francis Kub, U.S. Naval Research Laboratory

Charles Eddy, US Naval Research Laboratory

Jr., Naval Research Laboratory

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