2.1.4.2024 Overlapping source field plate process module for high-voltage GaN HFETs with low off state leakage currents

Houssam Halhoul, Ferdinand-Braun-Institut (FBH)
Ralph-Stephan Unger, Ferdinand-Braun-Institut (FBH)
Frank Brunner, Ferdinand-Braun-Institut, Berlin, Germany
Oliver Hilt, Ferdinand-Braun-Institut (FBH)
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