2.1.4.2024 Overlapping source field plate process module for high-voltage GaN HFETs with low off state leakage currents

Houssam Halhoul, Ferdinand-Braun-Institut (FBH)
Ralph-Stephan Unger, Ferdinand-Braun-Institut (FBH)
Frank Brunner, Ferdinand-Braun-Institut (FBH)
Oliver Hilt, Ferdinand-Braun-Institut (FBH)

2.1.4.2024 Overlapping source field plate process module for high-voltage GaN HFETs