2.1.4.2024 Overlapping source field plate process module for high-voltage GaN HFETs with low off state leakage currents

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Houssam Halhoul, Ferdinand-Braun-Institut (FBH)

Ralph-Stephan Unger, Ferdinand-Braun-Institut (FBH)

Frank Brunner, Ferdinand-Braun-Institut (FBH)

Oliver Hilt, Ferdinand-Braun-Institut (FBH)

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