2.2.2021 Hybrid NH3/N2 Molecular Beam Epitaxy with Artificial-Intelligence-Assisted Reflection High-Energy Electron Diffraction Analysis

Young-Kyun Noh, IVWorks Co., Ltd.,
Hong-Kyun Noh, VWorks Co., Ltd.,
Byung-Guon Park, IVWorks Co., Ltd.,
Seullam Kim, IVWorks Co., Ltd.,
Cheng-Yu Chen, IntelliEpi Inc.,
Tsung-Pei Chin, IntelliEpi Inc.
Wei Li, IntelliEpi Inc.
Yung-Chung Kao, IntelliEpi Inc.
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