2.2.2021 Hybrid NH3/N2 Molecular Beam Epitaxy with Artificial-Intelligence-Assisted Reflection High-Energy Electron Diffraction Analysis

Young-Kyun Noh, IVWorks Co., Ltd.,

Hong-Kyun Noh, VWorks Co., Ltd.,

Byung-Guon Park, IVWorks Co., Ltd.,

Seullam Kim, IVWorks Co., Ltd.,

Cheng-Yu Chen, IntelliEpi Inc.,

Tsung-Pei Chin, IntelliEpi Inc.

Wei Li, IntelliEpi Inc.

Yung-Chung Kao, IntelliEpi Inc.

[embeddoc url=”http://csmantech.org/wp-content/uploads/Digest/Digests-2021/2.2.2021-CSMantech2021_IVWorks-IET_Final_paper_2nd-draft_v03.pdf” download=”all” viewer=”google”]

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