2.4.2021 The Phenomenon of Charge Activated Visibility of Electrical Defects In 4H-SiC; Application for Comprehensive Non-Contact Electrical and UV-PL Imaging and Recognition of Critical Defects

M. Wilson, Semilab SDI
David Greenock, X-Fab
Dmitriy Marinskiy, Semilab SDI, Tampa, FL,
Carlos Almeida, Semilab SDI
John D’Amico, Semilab SDI
Jacek Lagowski, Semilab SDI, Tampa, FL,
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