2.4.2021 The Phenomenon of Charge Activated Visibility of Electrical Defects In 4H-SiC; Application for Comprehensive Non-Contact Electrical and UV-PL Imaging and Recognition of Critical Defects

M. Wilson, Semilab SDI

David Greenock, X-Fab

Dmitriy Marinskiy, Semilab SDI, Tampa, FL,

Carlos Almeida, Semilab SDI

John D’Amico, Semilab SDI

Jacek Lagowski, Semilab SDI, Tampa, FL,

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