2.4.2021 The Phenomenon of Charge Activated Visibility of Electrical Defects In 4H-SiC; Application for Comprehensive Non-Contact Electrical and UV-PL Imaging and Recognition of Critical Defects

M. Wilson, Semilab SDI

David Greenock, X-Fab

Dmitriy Marinskiy, Semilab SDI, Tampa, FL,

Carlos Almeida, Semilab SDI

John D’Amico, Semilab SDI

J. Lagowski, Semilab SDI

[embeddoc url=”http://csmantech.org/wp-content/uploads/Digest/Digests-2021/2.4.2021-CSMantech-2021-Macro-QUAD-Manuscript-rev1.pdf” download=”all” viewer=”google”]

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