2.4.2023 High-k Nanolaminate Gate Dielectric for SLCFET Amplifiers with Improved Frequency Performance and Breakdown Voltage

Shamima Afroz, Northrop Grumman
T. Vasen, Northrop Grumman Mission Center
B. Novak, Northrop Grumman (MS), Linthicum, MD
G. Grisafe, Northrop Grumman Mission Center
Virginia Wheeler, U.S. Naval Research Laboratory
P. Shea, Northrop Grumman Mission Center
S. Van Campen, Northrop Grumman Mission Center
J. Chang, Northrop Grumman Mission Center
R. Howell, Northrop Grumman (MS), Linthicum, MD

2.4.2023_Afronz_Final_Paper