20.3 Some Process Development Issues for Ka-band GaN HEMT Individual Source Via (ISV)

Yongjie Cui, Qorvo Inc.
John Hitt, Qorvo Inc.
Tso-Min Chou, Qorvo Inc.
Shuoqi Chen, Qorvo Inc.
David Gonzalez, Qorvo, Inc.
Yinbao Yang, Qorvo, Inc.
Trish Smith, Qorvo Inc.
Ju-Ai Ruan, Qorvo Inc.
Vivian Li, Qorvo Inc.
Cathy Lee, Qorvo Inc.
Andrew Ketterson, Qorvo Inc.
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