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Explore
Our Mission
Board of Directors
Executive Committee
Technical Program Committee
2022 Conference Collage
Sponsors
Exhibitor
Authors
Digests
Contact
2025 Second Call for Papers
Authors link
20.4 Carbide Coatings for MOCVD Wafer Carrier Protection
Hao Qu, Momentive Performance Materials
Wei Fan, Momentive Performance Materials Inc
Sudarshan Natarajan, Momentive Performance Materials
Creighton Tomek, Momentive Performance Materials
Gregory Shaffer, Momentive Performance Materials
B. Kozak, Momentive Technologies
