20.5 Characterization of ALD High-k Dielectrics in GaN and Ga2O3 Metal-Oxide-Semiconductor Systems

David Shahin, University of Maryland

Virginia Wheeler, U.S. Naval Research Laboratory

Marko Tadjer, U.S. Naval Research Laboratory

Lunet Luna, U.S. Naval Research Laboratory

Andrew Koehler, U. S. Naval Research Laboratory

Karl D. Hobart, U.S. Naval Research Laboratory

Charles Eddy, US Naval Research Laboratory

Jr., Naval Research Laboratory

Fritz Kub, Naval Research Laboratory

Aris Christou, University of Maryland-College Park

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