20.5 Characterization of ALD High-k Dielectrics in GaN and Ga2O3 Metal-Oxide-Semiconductor Systems

David Shahin, University of Maryland
Virginia Wheeler, U.S. Naval Research Laboratory
Marko Tadjer, U.S. Naval Research Laboratory
Lunet Luna, U.S. Naval Research Laboratory
Andrew Koehler, Naval Research Laboratory
Karl D. Hobart, U.S. Naval Research Laboratory
Charles Eddy, US Naval Research Laboratory
Jr., Naval Research Laboratory
Fritz Kub, Naval Research Laboratory
Aris Christou, University of Maryland-College Park
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