Explore
Our Mission
Board of Directors
Executive Committee
Technical Program Committee
Sponsors
Authors
Exhibits
Digests
Contact
40th Anniversary (2026)
Best Poster-Awards
Best Paper History
Conference Chair History
Grab Your CSMANTECH Swag
Explore
Our Mission
Board of Directors
Executive Committee
Technical Program Committee
Sponsors
Authors
Exhibits
Digests
Contact
40th Anniversary (2026)
Best Poster-Awards
Best Paper History
Conference Chair History
20.6 Improving Process Tool Productivity by Correct Sealing Material Selection for Plasma Processes
Murat Gulcur, IDEX Sealing Solutions – Precision Polymer Engineering Ltd
Knut Beekmann, IDEX Sealing Solutions – Precision Polymer Engineering Ltd
Download Paper
