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Explore
Our Mission
Board of Directors
Executive Committee
Technical Program Committee
Sponsors
Authors
Exhibits
Digests
Contact
40th Anniversary (2026)
Best Poster-Awards
Best Paper History
Conference Chair History
3.1.3.2024 Optimization of AlScN Etch Processes Ensuring Minimum Bottom Electrode Loss
Samira Kazemi, KLA Corporation (SPTS Division)
Janet Hopkins, KLA Corporation (SPTS Division)
3.1.3.2024 Optimization of AlScN Etch Processes Ensuring Minimum Bottom Electrode Loss
