3.1.4.2024 Plasma Dicing for High Yield SiC Singulation

A. Croot, KLA Corporation (SPTS Division)
B. Jones, Swansea University
J. Mitchell, Swansea University, KLA Corporation (SPTS Division)
Huma Ashraf, KLA Corporation
M Jennings, KLA Corporation, SPTS Technologies Division, Swansea University
J. Hopkins, KLA Corporation (SPTS Division)
O. J. Guy, Swansea University
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