3.1.4.2024 Plasma Dicing for High Yield SiC Singulation

Abstract Submission Site is LIVE! The first 10 abstracts submitted and accepted will be eligible for a prize drawing.

A. Croot, KLA Corporation (SPTS Division)

B. Jones, Swansea University

J. Mitchell, KLA Corporation (SPTS Division)

Huma Ashraf, KLA Corporation (SPTS Division)

M Jennings, Swansea University

Janet Hopkins, KLA Corporation (SPTS Division)

O. J. Guy, Centre for Integrative Semiconductor Materials (CISM),

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