4.1.3.2024 Influence of Carbon Capping Materials during High Temperature Annealing on Surface, Defects and Dopant Profile in SiC

J. A. Turcaud, Coherent Corp.
D. Lee, Coherent Corp.
D. Rossman, Coherent Corp.
J. Schuur, Coherent Corp.
R. Chebi, Coherent Corp.
Loader Loading...
EAD Logo Taking too long?

Reload Reload document
| Open Open in new tab

Download [271.16 KB]