4.1.3.2024 Influence of Carbon Capping Materials during High Temperature Annealing on Surface, Defects and Dopant Profile in SiC

J. A. Turcaud, Coherent Corp.
D. Lee, Coherent Corp.
D. Rossman, Coherent Corp.
J. Schuur, Coherent Corp.
R. Chebi, Coherent Corp.

4.1.3.2024 Influence of Carbon Capping Materials during High Temperature Annealing