4.1 A Wafer-Level Uniformity Improvement by the Substrate Off Angle Control for the Vertical GaN-on-GaN Power Switching Devices

Fumimasa Horikiri, Sciocs Company Limited
Yoshinobu Narita, Sciocs Company Limited
Takehiro Yoshida, Sciocs Company Limited
Toshio Kitamura, Sciocs Company Limited
Yukio Abe, Sciocs Company Limited
Hiroshi Ohta, Hosei University
Tohru Nakamura, Hosei University
Tomoyoshi Mishima, Hosei University
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