5.1.2023 Isolation in Compound Semiconductors and the Risk of Neutron Generation with Implantation of Light Ions

J. A. Turcaud, Coherent Corp.
C. Heckman, COHERENT - INNOViON
V. Heckman, COHERENT - INNOViON
A. Hassan, COHERENT - INNOViON
R. Pong, COHERENT - INNOViON
J. Schuur, Coherent Corp.

5.1.2023_Turcaud_Neutron_TALK_CS_Mantech_2023_v3