5.2 – CMOS-Compatible Compound Semiconductors at imec

B. Parvais, imec vzw, Leuven, Belgium

5.2 Final.2025

Abstract
We present an overview of the solutions developed at imec for the manufacture of compound semiconductors in a CMOS-compatible process scalable to 300mm wafer size. Pioneering GaN-on-Si for more than a decade for power electronics, operation at 1200V is now possible. We demonstrate that GaN-on-Si can also achieve state-of-the art performance for 5G/6G wireless applications, both for base stations and user’s equipment. Cutting-edge InP-on-Silicon solutions are proposed for higher data rate wireless communication systems. A Si photonics platform including integrated light sources is proposed as a solution to the interconnect wall which constraints AI systems. The role of engineered substrates is discussed.