5.3.2023 Integration of Nichrome Process as a Competitive Alternative to Tantalum Nitride for Thin Film Resistors in Compound Semiconductors

Stephanie Y. Chang, Skyworks Solutions, Inc.
Shiban Tiku, Skyworks Solutions, Inc.
Tom Brown, Skyworks Solutions, Inc.
Lam Luu, Skyworks Solutions, Inc.
Manohar Krishnappa, Skyworks Solutions, Inc.
Randy Bryie, Skyworks Solutions, Inc.
Nercy Ebrahimi, Skyworks Solution Inc.

5.3.2023_Chang