5.5 Optimizing Process Conditions for High Uniformity and Stability of Tantalum Nitride Films Stephanie Chang, Shiban Tiku, and Lam Luu-Henderson

May 10, 2022 // 5:30pm

Shiban K. Tiku, Skyworks Solutions, Inc.

Lam Luu-Henderson, Skyworks Solutions Inc.

Stephanie Chang, Skyworks Solutions Inc.

[embeddoc url=”https://csmantech.org/wp-content/uploads/2023/09/5.5.2022-Optimizing-Process-Conditions-for-High-Uniformity-and-Stability.pdf” download=”all”]

Download Paper