5.5 Optimizing Process Conditions for High Uniformity and Stability of Tantalum Nitride Films Stephanie Chang, Shiban Tiku, and Lam Luu-Henderson - CS MANTECH Conference CS MANTECH Conference

May 10, 2022 // 5:30pm

5.5 Optimizing Process Conditions for High Uniformity and Stability of Tantalum Nitride Films Stephanie Chang, Shiban Tiku, and Lam Luu-Henderson

Shiban K. Tiku, Skyworks Solutions, Inc.

Lam Luu-Henderson, Skyworks Solutions Inc.

Stephanie Chang, Skyworks Solutions Inc.

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