5a.1 A Method for Yield and Scaling Characterization of FET Structures in an InGaP/GaAs Merged HBT-FET (BiFET) Technology

Andre Metzger
Jiang Li, Skyworks Solutions, Inc.
Mike Sun, Skyworks Solutions, Inc.
Ravi Ramanathan
Cristian Cismaru, Skyworks Solutions, Inc.
Jiro Yota
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