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5b.1 Crystal growth and wafer processing of Indium Phosphide 6″ substrate
Tomonori Morishita, Sumiden Semiconductor Materials Co., Ltd.
Kazuaki Kounoike, Sumiden Semiconductor Materials Co., Ltd.
Shinya Fujiwara, Sumiden Semiconductor Materials Co., Ltd.
Yoshiaki Hagi, Sumitomo Electric Industries, Ltd, Itami
Yoshiki Yabuhara, Sumitomo Electric Industries, Ltd, Itami
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