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Explore
Our Mission
Board of Directors
Executive Committee
Technical Program Committee
Conference
Conference at a Glance
Advance Program & Sessions
Sponsors
Exhibitor
Exhibitor Floorplan
Exhibitor add-ons
Authors
Digests
Contact
6a.1 Plasma-Enhanced ALD for Improved MOS Interfaces in III-V Semiconductors
Vallen Rezazadeh, University of Alberta
Kyle Bothe, University of Alberta
Amir Afshar, University of Alberta
Kenneth Cadien, University of Alberta
Douglas Barlage, University of Alberta
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