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6a.4 Ablation Laser Dicing for GaN HEMT Device on 100um SiC/Au Substrates
Vivian Li, Qorvo Inc.
Wade Skelton, Qorvo Inc.
Yinbao Yang, Qorvo, Inc.
Andrew Ketterson, Qorvo Inc.
Michael Lube, Qorvo
Harold Isom, Qorvo
Cathy Lee, Qorvo Inc.
Rob Kraft, Qorvo Inc.
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