7.2.4.2024 Edge Termination Engineering with Shallow Bevel Mesas for Low-Leakage Vertical GaN-based p-i-n Avalanche Photodiode

Zhiyu Xu, Georgia Institute of Technology, Atlanta, GA
Theeradetch Detchprohm, Georgia Institute of Technology
Shyh-Chiang Shen, Georgia Institute of Technology
A. Nepomuk Otte, Georgia Institute of Technology
Russell D. Dupuis, Georgia Institute of Technology, Atlanta, GA
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