7.2.4.2024 Edge Termination Engineering with Shallow Bevel Mesas for Low-Leakage Vertical GaN-based p-i-n Avalanche Photodiode

Zhiyu Xu, Georgia Institute of Technology,
Theeradetch Detchprohm, Georgia Institute of Technology
Shyh-Chiang Shen, Georgia Institute of Technology
A. Nepomuk Otte, Georgia Institute of Technology
Russell D. Dupuis, Georgia Institute of Technology

7.2.4.2024 Edge Termination Engineering with Shallow Bevel Mesas