Explore
Our Mission
Board of Directors
Executive Committee
Technical Program Committee
2022 Conference Collage
Sponsors
Exhibitor
Authors
Digests
Contact
Attendee Registration
Attendee Registration OPEN!
Exhibit Hall is sold out
Explore
Our Mission
Board of Directors
Executive Committee
Technical Program Committee
2022 Conference Collage
Sponsors
Exhibitor
Authors
Digests
Contact
Attendee Registration
7.2 An Analysis of the Surface Morphology of the GaN-on-GaN Epi Wafers and the Control by the Substrate Off Angle
Fumimasa Horikiri, Sciocs Company Limited
Yoshinobu Narita, Sciocs Company Limited
Takehiro Yoshida, Sciocs Company Limited
Chikashi Ito, KLA-Tencor Limited
Varun Gupta, KLA-Tencor Limited
Anoop Somanchi, KLA-Tencor Limited
Download Paper