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7.2 An Analysis of the Surface Morphology of the GaN-on-GaN Epi Wafers and the Control by the Substrate Off Angle
Fumimasa Horikiri, Sciocs Company Limited
Yoshinobu Narita, Sciocs Company Limited
Takehiro Yoshida, Sciocs Company Limited
Chikashi Ito, KLA-Tencor Limited
Varun Gupta, KLA-Tencor Limited
Anoop Somanchi, KLA-Tencor Limited
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